Cypress
Semiconductor
Texas
2001-2008
Because chamber seasoning requirements were unique to the MXP tool, this function was implemented in the interfacing software (sometimes called a cell controller), rather than at the MES (manufacturing execution system) level. Wandins of recipes which would violate the cell rule tables setup by engineering in the software, would be rejected.
amat mxp etcher
At Cypress Texas, the Applied Materials MXP etcher was used for a number of etches, including several very tricky ones to either side of the transistor gate area. Because these etches were relatively fast - consistent etch rates were critical. This, in turn, depended on what had been previously been etched in each of three independent chambers. This was called chamber seasoning and was tracked by the software.