Cypress
Semiconductor
Texas
2001-2008
The interfacing software played a typical role in bridging the gap between the fab MES (manufacturing execution system) that knew the recipe, and the Brooks/Semy TMX software, thereby preventing the wrong recipe from being run on multi-lot furnace batches.
Brooks TMX Thermco Furnaces
Furnace recipe selection is pretty straightforward. The Brooks Automation supplied Semy TMX controller was the "passthrough" interface point, and acted as a cluster tool for up to eight furnaces, each of which had its own independent lower level Thermco controller.